GFab has the following Spare Parts and Subassemblies available for sale:

LOC Part # MFG. PART NUMBER Description N/U/R
1 0040-52662    RE-FURB UPPER CHAMBER  REFURB
2 0021-01421    RE-FURB UPPER CHAMBER A-COAT M-DPS REFURB
3 0200-02468   Liner Chamber Upper NEW
4 0190-01195  GW2502MA-F1N000-A1 POWER SUPPLY , RF, 2,500W, 2MHZ, 2  USED
4 0190-04028  GMW25A-2DOF3NO-004 POWER SUPPLY , RF, 2,500W, 2MHZ, 2  USED
5 0242-35594   Kit Hoist Dome Lift, DPS w/ DTCU NEW
5 0020-35708   "" Include in kit above NEW
5 0021-35711   "" Inculde in Kit above NEW
6 0242-35594   Kit Hoist Dome Lift, DPS w/ DTCU NEW
6 0020-35708   "" Include in kit above NEW
6 0021-35711   "" Inculde in Kit above NEW
7 0242-35594   Kit Hoist Dome Lift, DPS w/ DTCU NEW
7 0020-35708   "" Include in kit above NEW
7 0021-35711   "" Inculde in Kit above NEW
8 0010-02497 EX-1 IPS BIAS MATCH Astex (MKS) EX1 NEW
9 0200-89033    Shaft Susceptor Support w/ pins ZNNN NEW
10 0200-89015   Shaft Wafer Lift 9.0 BC NEW
11 0190-35798 TK2D-16TC ZNEN: 16 CHANNEL TEMPERATURE CONTROLLER Blue Point Controls, Inc REFURB
12 5090-01009   Cooling Fluid Heat Transfer 135 Boil Point HT NEW
13 5090-01009   Cooling Fluid Heat Transfer 135 Boil Point HT NEW
14 3620-01124  
TMP2003
 Turbo Molecular Pump Shimadzu     Refurb           TMP2003-LM3
15 3620-01124

TG2003M

Magnetic Suspended Compound Molecular Pump (OSAKA VACCUM)


 Refurb
16 0201-35981 BSR-111700 12.22 ID Quartz Isolator w/seals 12.22ID SPE Ring TFE/VT NEW
17 3620-01593  262-81459-02 Shimadzu EI-2003M  PUMP TURBO Controller PO35 208V 50/60HZ USED
18 0240-40601   MCC to Legacy retrofit kit ETCH 5200 Controller NEW
18 0100-35049   ASY PCB SYS RESET / INTLK SEL  NEW





18 0150-76061   Cable Assy. Centura Serial Interconnect NEW
18 0010-20095   Assy. 3.5 Micro Floppy 1.4 MB NEW
18 0010-13025   Assy. PCB Video/Serial Dist. Brd. NEW
18 0190-75084   VGA Video Controller, Modified NEW
18 0010-75224   Assy, Hard Disk Drive 2.1 GB NEW
18 0020-33166   Gasket NEW
18 0150-35140   Cable Assy, Hard Disk Power NEW
18 0150-35141   Cable Assy, Floppy Disk Power NEW
18 0150-76099   Cable Assy, SCSI Interface Centura NEW
18 0150-76062   Cable Assy, SCSI Interconnect Centura NEW
18 0190-35893   CD-ROM, DE/SETCH M/F Online Tech Manuals, Win 95/NT  NEW
18 0190-36630   CD-ROM, Centura ETCH Legacy SW REL Notes, Win 95/NT NEW
19 1140-01205 TC440-C Osaka Vaccume PS Controller 
USED
20 NPN 3155031-004B Advanced Energy Automatch, 13.56Mhz (AZX-90) USED
20 0010-02497 EX-1 IPS BIAS MATCH Astex (MKS) EX1 USED
20 0190-35631   IPS Bias Cable to Chamber USED
21 3620-01593  262-81459-02 Shimadzu EI-2003M  PUMP TURBO Controller PO35 208V 50/60HZ USED
21 NPN 305W-A Ebara Turbo Molecular Pump Controller  305W-A USED
22 0920-00027 3155156-001 Advanced Energy Navigator Match 5513-L80Z USED
23 0190-01291 ABX-X494 Astex Filter Board ABX-X494 NEW
24 0190-36684 80-P01-HP ETO IPS 80-S10 IPS Electrostatic Power Supply  E-chuck USED
25 0190-18154 ABX-X302 ETO HV Diode Board    *** NEEDS REPAIR*** USED
26 0190-18138   No pic. ABX-X272 ETO RF Gen PS Control Bd Ultima NEW
27 0010-37918   Assy PCB Encl. Source Sig Cond USED
28 0190-36680 ARX-X258-SP ETO 2.0 Mhz Wattmeter ARX-X258 SP USED
29 0150-10648   Source Signal Conditioning Board Cable K-Tec Electronics USED
30 0190-36681 ARX-X268 ETO  1.7 Mhz Wattmeter  USED
31 0242-35595   KIT,BEAM & POWER SUPPLY,DOME LIFT,DPS CE NEW
31 0010-36474A   Western Precision Inc. Power Supply NEW
31 0040-20445   WPI Post Long Frame Support NEW
31 0021-35709   WPI Hardware NEW
31 0021-35710   WPI Hardware NEW
31 0010-36525   Assy, Select Control NEW
31 0090-20129   Power Cable NEW
31 0150-36050   Low voltage Cable NEW
31 0242-35595H   Various Hardware NEW
32 0201-12801   Set Kit 2 boxes See inventory, NEW
33 0200-02696   Single Quartz Ring 200mm SNNF  NEW
34 0190-36680 ARX-X258-SP ETO 2.0 Mhz Wattmeter ARX-X258 SP USED
35 0190-18136 ABX-X284 ETO RF Gen HV Cap Bank Ultima USED
36 NPN APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
36   APC-001-B-1 Nor Cal Products Intellisys Adaptive Pressure Controller USED
37 0190-A0005    ZNNN: SPINDEL VACUUM CHANNEL +1/4  REFURB
37 NPN TBVG00-S03 Norcal Throttling Butterfly Valve USED
37   TBVG00-S02 Norcal Throttling Butterfly Valve USED
37   TBVG00-S02 Norcal Throttling Butterfly Valve USED
37   TBVG00-S02 Norcal Throttling Butterfly Valve USED
37   H213A-020 Headland flow meter with hoses USED
37   0140-LL110 Cables NEW
37   0140-LL108 Cables NEW
37   0140-LL106 Cables NEW
38 0920-00024 3150852-001 Advanced Energy VH2060 Source Generator Producer Etch USED
39 0200-02696   Single Quartz Ring 200mm SNNF  NEW
40 0200-02848      Single Ceramic Ring NEW
41 3620-01593 262-81459-02 Shimadzu EI-2003M  PUMP TURBO Controller PO35 208V 50/60HZ USED
42 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ USED
43 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ USED
44 NPN A3L3L000CA140D111A Advanced Energy 13.56 Mhz, APEX 1513 Rev G USED
45 0190-36308  GMW25A-2D0FNO-003 RF GEN .2500W 1.8-2.2MHZ 200/208VA  USED
46 0190-A0005    SPINDEL VACUUM CHANNEL +1/4  USED
47 0240-76710   Kit, IHC perchamber, Centura Metal Etch NEW
47 0010-40240   IHC Assembly, 400 Torr/50SCCM NEW
47 3700-01288   USE 3320-01165 GSK VCR 1/4 NEW
47 3690-04088   SCR Cap SKT HD 10-32 X1 /2L HEX SKT SST W/LW NEW
47 0150-75213   Cable Assy, MFC Adapter with EMI filter D NEW
48 0242-07143   Kit Retrofit, Pirani / ATM Switch Assy. NEW
48 0190-36521   Pirani / ATM switch Assy. NEW
48 3320-01024   Use 3320-01165 GSKT VCR 1/4 NEW
48 0250-01187   Pirani /ATM Switch Assy procedure USED
49 0920-00024 3150852-001 Advanced Energy VH2060 Source Generator Producer Etch USED
50 0190-02949 ARX-X242 ASTEX 4KW BIAS SOURCE DECK ARX-X242 REFURB
51 NPN   Various Parts in Grey tote  
51 0140-01541   Cable Assy. NEW
51 0200-36665   Window Quartz .50 Thk Produce 200MM NEW
51 0040-32118   Metal panel NEW
51 0100-09307   AMAT Relay DTLR Interlock NEW
51 0060-76188   Warning Labels NEW
51 0040-38662   ID# 12939900 NEW
51 3370-01171   Handles NEW
51 0150-10409   Power Cables NEW
51 0150-39233   Power Cable Remote A/C NEW
51 0021-03740   Plate NEW
51 0040-03062   Cover VME System Controller NEW
51 0021-03741   Quartz Guide Lid Producer NEW
51 0021-08869   VME Panel NEW
51 0021-08343   Front AC skin NEW
51 0040-01496   Front Panel NEW
51 0040-32063   UNKNOWN NEW
51 3300-05312   FTG Tube NEW
51 0720-05029   Connector Comm Adapter NEW
51 0680-01215   CB/EMO NEW
52 NPN CSD5814N-T VEXTA 5-PHASE DRIVER 24V +/-10% 2.1A USED
53 NPN 110C Luxtron Model 100C optical Fiber Temperture Control System USED
53 0190-36109 P1195 Phase Detector 208V USED
53 0190-36109 P1195 Phase Detector 208V USED
54 0021-06757   Electronic Enclosure Cover TiC L4 TiN NEW
55 4217-03511   440 ft 3/8" Hose NEW
56 1110-01063 3155086 Dome NETWORK RF SOURCE MATCH 13.56MHZ AZX-90 New
57 0190-00321    IPS AC FACILITY BOX,CH B/D  NEW
58 0920-00027 3155156-001 Advanced Energy Navigator Box # 0190-15207 USED
59 0920-01111 F120162-2 Astex GEN   MICROWAVE MAGNETRON HEAD 2.45GHZ 3 NEW
60 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ USED
61 3620-01593 262-81459-02 Shimadzu EI-2003M1  PUMP TURBO Controller PO35 208V 50/60HZ No box USED
62 0010-00878 982 005 SPRING COIL ASSY, SOURCE, DTCU, DPS USED
63 0010-00878 33894031 SPRING COIL ASSY, SOURCE, DTCU, DPS USED
64 0190-04193 VAT 216612/02/14 ETCH BOX 22 DPS slit Valve Insert New
65 3620-01218 A951100080

Leybold Turbo Vacuum 340MCT 110V 60Hz 8W


 Refurb
66 0010-37165 98-037 SPRING COIL ASSY, SOURCE, DTCU, DPS Cracked USED
66 0010-37165 98-037 SPRING COIL ASSY, SOURCE, DTCU, DPS Burnt USED
67 0240-11630   KIT, 200MM MIRRA/MESA RETROFIT PHASE A"  NEW
67 0240-07773   Kit, Retrofit, Linear Slide, I NEW
67 0240-10412   200MM Walking Beam Peek Finger NEW
67 0240-12040   Kit W/Metric HDWR Upgrade Grip NEW
67 0240-05184   Kit, MESA, Input Shuttle, 200W NEW
67 0240-07774   Kit, Retrofit, Housing, Input NEW
67 0010-04400   Assy, Shuttle Holder Flat, INP NEW
67 0240-12425   Kit, Retrofit 200MM HCLU RELIA NEW
68 0190-01195 GMW25A-2D0F3N0-004 Genesis RF Generator, 2,500W, 50-60HZ USED
69 3348-37599 A3L3L000CA140D111A Apex Generator W/ Unopened Manual and opened parts New
70 0920-00003 A3L3L000BA14D111A GEN   RF 13.56MHZ 3000W 208V SOURCE AE APEX USED
71 0190-36308  GMW25A-2D0FNO-004 RF GEN .2500W 1.8-2.2MHZ 200/208VA  REFURB
72 1140-01205 TC440-C Osaka Vaccume PS Controller USED
73 NPN INR-498-012B Thermo Chiller HX-2000 SMC Corporation 200-208 3 phase 3 wire + Grd. NEW
74 0242-14987 INR-244-602A Sub floor Mount for INR-244-602A NEW
75 0242-14987 INR-244-602A Chiller Parts NEW
75 3380-00010   HE Thermo Electric 220 Volt NEW
75 0190-03435   Hose Assy. NEW
75 0010-37128   Box D89 Tri port NEW
75 5090-01009   Cool Fluid Heat Transfer NEW
75 0620-02482   Cable Assy RS-232 25ft. NEW
75 0050-54791   Teflon Hose Assy. NEW
76 0242-14987 INR-244-602A Thermo Con SMC Chiller NEW

0221-31115        0010-37264   Multi Set Cool Down  USED
KR 0200-00458   Ceramic Robot Blade  
KR 2200-11311   DPS II Focus Ring Quartz 1/4  
KR 0200-02848   Single Ring Ceramic  
KR 0242-35595   Kit Beam Power Supply dome Lift  
KR 0200-02356   Single Ring Quartz, DPS Centura, SNNF .50 HT  
KR 0020-19139   Pumping Plate 200mm ALD TiN  
KR 2200-11312   DPS II Quartz 1/4 Single Ring  
KR 0200-01947   Susceptor  
KR 0190-15207   AE Navigator Match - Certified operational by AE  
KR 0040-38663      
KR NPN   Osaka Vacuum Power Supply TC-440-C  
KR 2109-17533   DPS II Inficon 100MT Manometer  
KR 0040-47442   Manifold W-Seal ECV 200mm  
KR 0010-00878   RF Coil DPS  USED
KR 0010-05475   Chuck  
KR NPN   DPS VAT AP MF Slit Valve Actuator  
KR 0010-01927   200mm SNNF BESC Bias Electrode Chuck NEW
KR 0190-09468   Seriplex Sensor Bus APC SPS Mux ADIO-10 NEW
KR 3700-02800   O-Ring ID 51.700 CSD I.D.X. 210 Viton, Producer NEW
KR NPN   5 Phase driver Model C505814 N-T No 3788 TR8 Oriental Motor Corr NEW
KR 3700-02550   O-Ring ABS 354 Nitrice NEW
KR 3030-08075   MFC 7340 5 SLM NF3 1/4 VCR MTL  NEW
KR 0630-01395   Draloric PE 100 14 kVp 600pf +/-5% R85 M3 New
KR NPN   QOB 330 5237 0037 Square D 10 kVa Breakers NEW
KR 0200-89032   Tip Shaft Susceptor, E2 Chamber NEW
KR 0720-00545   Pin Male NEW
KR 0200-01559   Baffle Inj LTV, high outer flow NEW
KR 0010-A0092/96174   APD Box 3mm Assy NEW
KR 0910-01178   Buss Fuses NEW
KR 0910-01180   Buss Fuses NEW
KR 0910-01179   Buss Fuses NEW
KR 0910-01164   Buss Fuses NEW
KR 0910-01136   Buss Fuses NEW
KR 0910-01133   Buss Fuses NEW
KR 0910-01163   Buss Fuses NEW
KR 0910-01166   Buss Fuses NEW
KR 0621-10733 P2     NEW
KR 0021-37657   Rev P1 NEW
KR 3030-04229 252201176 STEC SEC 4400 MC N20 2SLPM  NEW
KR 3690-04012     NEW
KR NPN   10K 001 4409221 FNT-1226 NEW
KR NPN   Roll Kaptan S-52 Pres Sensitive 2 mil 600degF service NEW
KR NPN   PermaLok Wicking Adhedsive Sealant NEW
KR 3030-04879   SNSR flow Insertion  NEW
KR 0090-A0004/96174   Vac Relay On/Off NEW
KR 3300-05237     NEW
KR 0900-01063   Filter Bandpass, UV387NM Ctr… NEW
KR 0020-19882   Tube Lift 200mm NEW
KR 0010-05745   Bias Match NEW


Part # REV Description
0010-01152
0010-01152
0010-01152
0010-01152
0010-01152
0010-01152
0010-04637 1 PIN CERAMIC W/O-RING LOADLOCK
0010-04637 1 PIN CERAMIC W/O-RING LOADLOCK
0010-04637 1 PIN CERAMIC W/O-RING LOADLOCK
0010-04638 1
0010-04638 1
0010-04639 1 ASSY,BRKT LEFT SAFETY BOLT
0010-07332 2 LLB 200MM LIFT HOOP CENT
0010-07332 2 LLB 200MM LIFT HOOP CENT
0010-09652 A HOSE ASSY, LAMP MODULE 500J
0010-09652
0010-09652
0010-09652
0010-09652
0010-09978 C ASSY. LAMP MODULE
0010-09978 C ASSY. LAMP MODULE
0010-09979
0010-09979
0010-13954 K
0010-13954 K
0010-13954K
0010-13954K
0010-20138 ASSY TC AMP HSNG
0010-20317
0010-20317
0010-20917
0010-20917
0010-21409 ASSY THERMAL SWITCH PVD CHAMBER
0010-222XXK
0010-222XXK
0010-22744 4 PVD LOWER CHAMBER
0010-22744 4 PVD LOWER CHAMBER
0010-22XXK
0010-22XXK
0010-3608 B LAMP MODULE CENTURA 200MM
0010-3608 B LAMP MODULE CENTURA 200MM
0010-70812 2
0010-70812 2
0010-76165 A
0010-76165 A
0010-76188 1
0010-76188 1
0010-9327XK
0010-9327XK
0015-01665
0015-01665
0015-09021 B DOWEL PIN
0015-09069 D SOC.HD.SCREW.MOD
0015-09078 C PULLEY, MOTOR, MOD THROTTLE DR
0015-09092
0015-09092
0015-09222 A COOLING PLATE ACTUATOR
0015-20002 C
0015-20002 C
0015-20037 B PULLEY MODIFIED 70 6R
0015-20037
0015-20037
0015-20037
0015-20037
0015-20037
0015-20037
0015-20113 SPROCKET MOD 15 TEETH
0015-20114
0015-20114
0015-35012 B MODIFICATION, RING ALIGN, SCREW
0015-35038 A PLUG T/CPORT 9/16-18UNF
0015-35281 P3 BRACKET OTF AMPLIFIER
0015-76015 B
0015-76015 B
0015-76016 B
0015-76016 B
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0015-76133 1
0020-01112 1 PLATE, RF INTERLOCK SWITCH, 300MM HDPCVD
0020-01190 C wHANDLE, ALUMINUM
0020-01665 1 FLAG, LOWER SENSOR, LIFT 300MM, HDPCVD
0020-01919 2 COVER CAPACITOR PROTECTIVE
0020-02173 SPACER SWLL HANDLE
0020-02381 2 BRACKET LIFT REGULATOR 300MM HDP-CVD, UL
0020-02510 COVER, PCB GAS BOX 300MM
0020-02510 5 COVER, PCB GAS BOX 300MM
0020-02510
0020-02510
0020-02535 2 NO MATCHES
0020-02590 3
0020-02590 3
0020-04148
0020-04148
0020-04150 A BUSHING, WATER BOX
0020-04278 P1
0020-04278 P1
0020-05749 PB
0020-05749 PBR ADAPTER W/B LOADLOCK ENDURA
0020-05749 PB
0020-05749 PBR ADAPTER W/B LOADLOCK ENDURA
0020-05808 A CLAMP, INSERT INSULATOR
0020-05808 A CLAMP, INSERT INSULATOR
0020-05809 A
0020-05809 A
0020-05809 A
0020-05809 A
0020-05919 2 STRUT,UPPER FI INTERFACE,300MM CENTURA M
0020-05992 A
0020-05992 A
0020-05992 A
0020-05992 A
0020-06754 E
0020-06754 E
0020-07045 P1 NO MATCHES
0020-07046 P1 BRACKET, STOP, 300MM LIFT ASSY, HDPCVD
0020-07070 P1 NO MATCHES
0020-07363 P1 COVER, SLIT VALVE, CH. TOP, 300MM, HDPCV
0020-08205 5
0020-08205 5
0020-08432 1
0020-08432
0020-08432
0020-08432
0020-08432
0020-08432 1
0020-08432 1
0020-08432
0020-08432
0020-08432
0020-08432
0020-08432 1
0020-08510
0020-08510
0020-08935 2
0020-08935 2
0020-08935 2
0020-08935 2 MOUNT PLATE RFHV3
0020-08935 2
0020-08935 2
0020-08935 2
0020-08935 2 MOUNT PLATE RFHV3
0020-09136 C HANGER LAMP MODULE
0020-09136
0020-09136
0020-09136
0020-09136
0020-09136
0020-09136
0020-09143 C WINDER, EXTENSION
0020-09150 E HOLDER, EXTENSION FORK
0020-09156 1
0020-09156 1
0020-09252 A NUT, TURN BUCKLE X-AXIS
0020-09270 E
0020-09270 E
0020-09270 E
0020-09270 E
0020-09275 A1 CLAMP, SHAFT Z-AXIS
0020-09277 A
0020-09277 A
0020-09281 1
0020-09281 1
0020-09285 C FLAG HOME SENSOR
0020-09291 B SUPPORT SHAFT, X-AXIS
0020-09292 F CRANK, X-AXIS DRIVE
0020-09339 E STUD, ROTATION DETECTOR
0020-09353 C CLAMP, TERMINAL
0020-09406 A
0020-09406 A
0020-09408 B BRKT, HOME SENSOR X-AXIS
0020-09423 D
0020-09423 D
0020-09424 C COVER, BOTTOM LAMP MOD
0020-09430 D COLLIMATOR
0020-09430 D COLLIMATOR
0020-09437
0020-09437
0020-09438
0020-09438
0020-09464 F
0020-09464 F
0020-09471 B
0020-09471 B
0020-09472 B CLAMP, SHAFT GUIDE
0020-09497 C
0020-09497 C BASE STORAGE ELEVATOR
0020-09497 C
0020-09497 C BASE STORAGE ELEVATOR
0020-09549
0020-09549 B
0020-09549 B
0020-09549
0020-09549 B
0020-09549 B
0020-09556 A CLAMP, FLOW CONTROLLER
0020-09586 E CRANK WINDOW
0020-09586 E CRANK WINDOW
0020-09586 E CRANK WINDOW
0020-09586 E CRANK WINDOW
0020-09586 E CRANK WINDOW
0020-09586 E CRANK WINDOW
0020-09626 C BAFFLE, BOTTOM
0020-09626 BAFFLE BOTTOM
0020-09626 BAFFLE BOTTOM
0020-09680
0020-09680
0020-09680
0020-09680
0020-09680
0020-09680
0020-09762 D ATTACHMENT SENSOR HOME
0020-09786 A DRIVER TOP
0020-09787 A COUPLING
0020-09788 A FOLLOWER BOTTOM
0020-09999 D
0020-09999 PLATE FRONT THROTTLE DR
0020-09999 PLATE FRONT THROTTLE DR
0020-09999 D
0020-09999 PLATE FRONT THROTTLE DR
0020-09999 PLATE FRONT THROTTLE DR
0020-10187 C
0020-10187 C CLAMPING RING,Q WIN
0020-10187 C
0020-10187 C CLAMPING RING,Q WIN
0020-10190 C PLATE CONNECTOR SACVD / WB
0020-10198 B BRACKET, Z AXIS
0020-10201 B
0020-10201 B
0020-10278 C BRACKET,HARNESS ROBOT DRIVE
0020-10278 C BRACKET,HARNESS ROBOT DRIVE
0020-10513 B SENSOR, OUTER NUT
0020-10573 B COLLIMATOR,CENTER
0020-10649 A
0020-10649 A PLATE CAP MA
0020-10649 A
0020-10649 A PLATE CAP MA
0020-10727 E COVER,TOP,4,5,6" TEOS
0020-10727 E COVER TOP 4", 5", 6" TEOS
0020-10727 E COVER TOP 4", 5", 6" TEOS
0020-10744 A MOUNT BALL NUT GIMBAL
0020-10747 B SLEEVE SPACER LEAD SCREW
0020-10769 1
0020-10769 1
0020-11229 COVER, CB CHAMBER AC BOX SAFETY
0020-11524 1 NO MATCHES
0020-13147 1
0020-13147 1
0020-13298 2
0020-13298 2
0020-13770 1 STUD, CRYO/GATE VALVE W/HEX SOCKET
0020-13953
0020-13953 A
0020-13953
0020-13953 A
0020-17202 2 FLANGE, 300MM BELLOWS WAFER LIFT CLAMP
0020-17365 1 HEATSINK BUSHING
0020-18107 P2
0020-18107 P2
0020-18107 P2
0020-18107 P2
0020-18107 P2
0020-18107 P2
0020-18354 A CLAMP, LIFT, HDP-CVD
0020-18354 A
0020-18354 A
0020-18355 1
0020-18355 1
0020-18355 1 BRACKET ACTUATOR
0020-18355 1
0020-18355 1
0020-18355 1 BRACKET ACTUATOR
0020-18359 A FLAG,SENSOR, LIFT, HDP-CVD
0020-18360 1 FLAG, SENSOR, LIFT, HDP-CVD
0020-18373 A INSULATOR, PLUG, HDP-CVD
0020-18386 A ADAPTER,TC,B2,MK2
0020-18386 A ADAPTER,TC,B2,MK2
0020-18386 A ADAPTER,TC,B2,MK2
0020-18810 SHOULDER SCREW, 300MM, HDPCVD
0020-18824 P2 CLAMP, LIFT, 300MM, HDP-CVD
0020-18825 P1 FLAG, TOP SENSOR, LIFT 300MM, HDP-CVD
0020-18826 P1 FLAG, LOWER SENSOR, LIFT 300MM, HDPCVD
0020-18923 B
0020-18923 B ADAPTOR BLAS RF MATCH ALTIMA
0020-18923 B
0020-18923 B ADAPTOR BLAS RF MATCH ALTIMA
0020-19493 P1 BUS GROUND DC SOURCE, 300MM PVD
0020-19973 2
0020-19973 2
0020-20164 1
0020-20164 1
0020-20175 2 COVER, PCB GASBOX, 300MM RPC
0020-20315 B1
0020-20315 B
0020-20315 B1
0020-20315 B
0020-20430
0020-20430 D COLLIMATOR
0020-20430 D COLLIMATOR
0020-20430 D COLLIMATOR
0020-20430
0020-20430 D COLLIMATOR
0020-20430 D COLLIMATOR
0020-20430 D COLLIMATOR
0020-20431 D
0020-20431 D
0020-20431 D
0020-20431 D
0020-20439 E VIEWPORT, COVER BUFFER/WAFER ORIENTER
0020-20439 E
0020-20439 E
0020-20439 E
0020-20439 E
0020-20488 A CLAMP BAKEOUT LAMP
0020-20488
0020-20488
0020-20515 N
0020-20515 N
0020-20538 C
0020-20538 C
0020-20579 C EXTENSION ARM, DC BIAS
0020-20626 C
0020-20626 C MOUNTING BLOCK SHUT OFF VALVE
0020-20626 C
0020-20626 C MOUNTING BLOCK SHUT OFF VALVE
0020-20653 E
0020-20653 E
0020-20653 E BASE HEATER
0020-20653 E
0020-20653 E
0020-20653 E BASE HEATER
0020-20654 F
0020-20654 F HEATER REFLECTOR
0020-20654 F
0020-20654 F HEATER REFLECTOR
0020-20655 C BUSS BAR UPPER 8"
0020-20656 C BUSS BAR LOWER
0020-20656 C
0020-20656 C
0020-20656 C
0020-20656 C
0020-20658 E
0020-20658
0020-20658 E
0020-20658
0020-20661 E BRACKET ELECTRICAL FEEDTHRU
0020-20662 D HEAT SHIELD 8IN, DEGAS
0020-20662 D HEAT SHIELD 8IN, DEGAS
0020-20662 D HEAT SHIELD 8IN, DEGAS
0020-20662
0020-20662
0020-20663 B BRACKET TERMINAL
0020-20663 B
0020-20663 B
0020-20666 B
0020-20666 B
0020-20726 B
0020-20726 B
0020-20754 D
0020-20754 D
0020-20754 D
0020-20754 D
0020-20784 TC HOLDER
0020-20896 E REFLECTOR HEATER, 5/6", DEGAS
0020-20897 D SOCKET RETAINER, 5/6", DEGAS
0020-20898
0020-20898
0020-20899 F
0020-20899 F
0020-20911 A BUSS BAR, LOWER 5/6"
0020-21043 1
0020-21043 1
0020-21069 C SLIP-HINGE, MALE, REAR STEP
0020-21070 C SLIP-HINGE, FEMALE, REAR STEP
0020-21112 B CLAMP 6" BLADE BUFFER ROBOT
0020-21113 E CAP 6" BUFFER ROBOT
0020-21140 C
0020-21140 C
0020-21205 B
0020-21205 B
0020-21261
0020-21261
0020-21261 1
0020-21261 1
0020-21261 D
0020-21261 1
0020-21261
0020-21261
0020-21261 1
0020-21261 1
0020-21261 D
0020-21261 1
0020-21675 C ARM LIFTER DEGAS/ ORIENTER
0020-21677
0020-21677
0020-21677 D
0020-21677
0020-21677 D BUSHING INNER MGNC
0020-21677
0020-21677
0020-21677 D
0020-21677
0020-21677 D BUSHING INNER MGNC
0020-21678 B HOUSING BEARING
0020-21678 B
0020-21678 B
0020-21680
0020-21680
0020-21680
0020-21680
0020-21681 A
0020-21681 A
0020-21681
0020-21681 A
0020-21681 A
0020-21681
0020-21682 A
0020-21682 A
0020-21682
0020-21682 A
0020-21682 A
0020-21682
0020-21684 E
0020-21684 E
0020-21684 E CASE WINDOW
0020-21684 E
0020-21684 E
0020-21684 E CASE WINDOW
0020-21686 D DISK HEATER
0020-21686 D
0020-21686 D
0020-21688 1
0020-21688 1
0020-21692
0020-21692 C
0020-21692
0020-21692 C
0020-21693 A
0020-21693 A
0020-21694 B
0020-21694 B TUBE LENS
0020-21694 B
0020-21694 B TUBE LENS
0020-21695 B
0020-21695 B SPACER LENS
0020-21695 B
0020-21695 B SPACER LENS
0020-21697 SUPPORT LENS
0020-21699 1 BRACKET MOUNT LASER SEE
0020-21706 C CHUCK 6" SEE
0020-21706 C CHUCK 6" SEE
0020-21706
0020-21706
0020-21707 D LIFTER 8"
0020-21707 D 8" LIFTER
0020-21707 D LIFTER 8"
0020-21707 D 8" LIFTER
0020-21708 C
0020-21708
0020-21708
0020-21708 D
0020-21708
0020-21708 C
0020-21708
0020-21708
0020-21708 D
0020-21708
0020-21779 B FLANCE, BLANKOFF CCD
0020-21780 A FLANGE, BLANKOFF ROTATION
0020-21880
0020-21880 C
0020-21880
0020-21880 C
0020-22295 1
0020-22295 1
0020-22309 B BOX CONNECTION LENS BLOCK
0020-22361 1
0020-22361 1
0020-22362 B
0020-22362 B
0020-22363
0020-22363 B
0020-22363 B
0020-22363
0020-22363 B
0020-22363 B
0020-22387
0020-22387
0020-22414 B 8" CHCK TC
0020-22414 B 8" CHCK TC
0020-22549 C PLATE BLANKOFF MOUNTING COUPLER
0020-22635 B CABLE HOLD DOWN
0020-22910 D
0020-22910 D
0020-23155 B BUSHING LASER
0020-23237 A PNL PANEL MNTG L/L SNSR PCB
0020-23237 A PNL PANEL MNTG L/L SNSR PCB
0020-23237 A PNL PANEL MNTG L/L SNSR PCB
0020-23350 D SHIELD RF HEATER TOP MTRZD LEFT
0020-23350 SHIELD RF HEATER TOP MTRZD LEFT
0020-23350 D
0020-23350 D
0020-23350 D
0020-23350 D
0020-23482 1
0020-23482 1
0020-23482 1
0020-23482 1
0020-23591 B
0020-23591 B
0020-23591 B
0020-23591 B
0020-23594 C
0020-23594 C
0020-23645 1 CLMP MIRROR CLAMP
0020-23646 A
0020-23646 A
0020-23916 10
0020-23916 10
0020-23919 6.35
0020-23919 6.35
0020-23920 10
0020-23920 10
0020-23922 PB SHAFT SPROCKET COVER LIFT
0020-23928 5.9
0020-23928 5.9
0020-24144 A
0020-24144 A
0020-24363
0020-24363
0020-24367 A PLATE MOUNT ADAPTER
0020-24367
0020-24367
0020-24367 A PLATE MOUNT ADAPTER
0020-24367
0020-24367
0020-24378 A BRACKET
0020-24719 PC
0020-24719 PC
0020-24821 1 PLATE CONT. RIGHT HP DC 300 PVD
0020-24877 PA SP SIDE RECEIVER
0020-24878 PA SP SIDE RECEIVER (W/GROOVE)
0020-24890 1 LIMITER WAFER LIFT PC II
0020-25018 PB
0020-25018 PB
0020-25018 PB
0020-25018 PB
0020-25304 A CAP, HTHU 6" HEATER
0020-25317 A
0020-25317 A
0020-25614 1&3&P1 CLAMP, 300MM HEATER LIFT
0020-25615 2 CLAMP, 300MM WAFER LIFT
0020-25622 2 FLANGE, 300MM HEATER CLAMP
0020-26093 PLATE, LEFT DC SOURCE CONNECTOR, 300MM P
0020-26095 2 GROUND, BUSHING
0020-26096 1 GUIDE, BUSHING
0020-27118 PB EXTENSION PIN OPEN INTERLOCK
0020-27126 B
0020-27126 B
0020-27135 A SPACER, ACTUATOR SHUTTER LINKAGE
0020-27808 1
0020-27808 1
0020-27975 2
0020-27975 2
0020-27999 1 FINGER GROUNDED FINGER ASSY 300MM E-CHUC
0020-27999 1 FINGER GROUNDED FINGER ASSY 300MM E-CHUC
0020-28044 A GROUNDING BUSS BAR 11 POS
0020-28464 2
0020-28464 2
0020-28464 2
0020-28464 2
0020-28464 2
0020-28464 2
0020-28509
0020-28509
0020-28513 P1
0020-28513 P1
0020-28754 C PEDESTAL COVER 8" 101 VECTRA-IMP
0020-28754 C
0020-28754 C
0020-28754 C
0020-28754 C
0020-28756 2 STUD CRYO/GATE VALVE W/HEX SOCKET
0020-29303 A
0020-29303 A
0020-29311 A SPACER, SOURCE GUIDE PIN, VECTRA IMP
0020-29311 A SPACER, SOURCE GUIDE PIN, VECTRA IMP
0020-29342 A NUT RF FEEDTHRU .250" WIDE VECTRA IMP
0020-29348 A
0020-29348 A CUP PUTER FEED THRU
0020-29348 A
0020-29348 A CUP PUTER FEED THRU
0020-29865 2 RING CLAMP SHIELD IMP 300MM
0020-29894
0020-29894 2 PLATE BACKING 300MM A1 TI SOURCE
0020-29894
0020-29894 2 PLATE BACKING 300MM A1 TI SOURCE
0020-30238 A PIN, WAFER LIFTING, SPUTTER ETCH
0020-30746 A FINGER 200MM WAFER SPT PRSP
0020-30746 A
0020-30746 A
0020-30958 B&C FILTER, SLIT WINDOW,PRSP
0020-31108 B ADAPTER, STRAIN RELIEF, PRSP3
0020-31108
0020-31108 B
0020-31108
0020-31108 B
0020-31345
0020-31345
0020-31345
0020-31345
0020-31347 A
0020-31347 A
0020-31347
0020-31347 A
0020-31347 A
0020-31347 A
0020-31347 A
0020-31347
0020-31347 A
0020-31347 A
0020-31468 B BRACKET,T.C. CONNECTOR,ASP
0020-31519 B PLUNGER,INTERLOCK SWITCH ASP
0020-32953 B
0020-32953 B
0020-32990 A PRIMARY ARM EXTENSION DRIVE P5000 MC ROB
0020-32991 C SECONDARY ARM EXTENSION DRIVE P5000 MC R
0020-32992 B PRIMARY LINK ROTATION STABILIZER P5000 M
0020-32994 A SUPPORT PLATE BLADE P5000 MC ROBOT
0020-32995 A COUPLER PLATE, ARMS & LINKS, P5000 ROBOT
0020-32996 C BEARING HSG SECOND ARM/BLADE SUPPORT P50
0020-32997 A BEARING TUBE COUPLER P5000 MC ROBOT
0020-33000 A BEARING HSG COUPLER, LWR P5000 MC ROBOT
0020-33003 A BEARING MNT SECONDARY LINK, COUPLER P500
0020-33004 A COVER PLATE GEARS, COUPLER P5000 MC ROBO
0020-33007 A BEARING HSG ROTATION DRIVE PLATE P5000 M
0020-33009 A BRG SPACER COUPLER SECONDARY/ARM P5000
0020-33011 A BEARING HSG PRIMARY LINK/COUPLER P5000 M
0020-33012 A BEARING SUPT PRIMARY LINK COUPLER P5000
0020-33013 A BRG SUPPORT PRIM. LINK/ROTATION PLT P500
0020-33017 A BRG SPACER SECONDARY LINK/COUPLER P5000
0020-33019 A BRG RET LWR, CPLR/SECONDARY ARM P5000 MC
0020-33022 1 BEARING SUPPORT INNER EXTENSION DRIVE P5
0020-33029 A MOUNTING PLATE INNER DRIVE P5000 MC ROBO
0020-33030 1 MAGNET RING INNER R
0020-33030 1 MAGNET RING INNER R
0020-33032 A BEARING SPACER INNER EXTENSION DRIVE P50
0020-33033 A
0020-33033 A
0020-33035 A
0020-33035 A
0020-33035 A
0020-33035 A
0020-33037 A CLAMP RING ROATATION FLAG, P5000 ROBOT
0020-33038 A BEARING RETAINER VACUUM HOUSING P5000 MC
0020-33039 A WAFER GRIP 200MM BLADE, P5000 MC ROBOT
0020-33043 A BRG SUPPORT ECCENTRIC LINK/BLADE GRIP MC
0020-33047 A BUSHING, WAFER GRIP MC-ROBOT P5000
0020-33052 A BEARING RETAINER OUTER EXTENSION P5000
0020-33054 A BEARING SPACER INNER ROTATION DRIVE P500
0020-33056 A BEARING RETAINER OUTER ROTATION P5000 MC
0020-33059 A FLAG RING ROTATION SENSOR P5000 MC ROBOT
0020-33061 A CLAMP RING EXTENSION FLAG P5000 MC ROBOT
0020-33064 1 FLAG RING EXTENSION SENSOR P5000 MC ROBO
0020-33065 A
0020-33065 A
0020-33066 A MAGNET RING OUTER
0020-33066 A MAGNET RING OUTER
0020-33067 1 MAGNET RING INNER EXTENSION, LOWER P5000
0020-33306 A NO MATCHES
0020-33310 B SUPPORT,HINGE LID,R2
0020-33377 A SPRING CLIP WAFER GRIP P5000 MC ROBOT
0020-33882 A
0020-33882 A INSULATING WASHER R2
0020-33882 A
0020-33882 A INSULATING WASHER R2
0020-34338
0020-34338
0020-34697 A NO MATCHES
0020-34697
0020-34697
0020-35544 P1 DISC, ADJUSTMENT RETAINER
0020-35625 A
0020-35625 A
0020-35837 A PWR BLOCK, 1 TO 4, 100 AMPS
0020-35872 A
0020-35872 A
0020-35972 A
0020-35972 A
0020-35993 A
0020-35993 A
0020-36610 A BASE ROTATION LOCK INDEXER
0020-36751 A
0020-36751 A
0020-37209 A
0020-37209 A
0020-40002 A KEY ACTUATOR
0020-40002 A KEY ACTUATOR
0020-40063 A BRACKET, BOTTOM, MOTOR
0020-40117 A PLATE BLOCKOFF 1.40 DIA TRANSFER CHAMBER
0020-40701 1 FLANGE, DRIVER ACTUATOR
0020-40701 1 FLANGE, DRIVER ACTUATOR
0020-40701 1 FLANGE, DRIVER ACTUATOR
0020-40703 KEY COUPLING MAIN S
0020-40703 KEY COUPLING MAIN S
0020-40897 1 CLAMP, DIFFUSER RING LL, PS, MAK II
0020-40900 A NAMEPLATE, APPLIED MATERIALS LOGO
0020-41162 A SLEEVE
0020-41469
0020-41469
0020-41508 3
0020-41508 3
0020-41971 1 COVER, INTLK SWITCH, WATER BOX 300MM
0020-41972
0020-41972
0020-42002 P2
0020-42002 P2
0020-42002 P2
0020-42002 P2
0020-42003 P2
0020-42003 P2
0020-42080 A PLATE PUMPING 6"
0020-42080 A PLATE PUMPING 6"
0020-42082 A PLATE, PUMPING 8"
0020-42082 A PLATE, PUMPING 8"
0020-42229 3
0020-42229 3
0020-42471 1 MOUNT ACTUATOR FLAT SOURCE MOTORIZED 300MM PVD
0020-42998 1
0020-42998 1
0020-43426 1 BLOCK, MODIFIED HEATER LIFT 300MM PVD
0020-43426 1 BLOCK, MODIFIED HEATER LIFT 300MM PVD
0020-43426 1
0020-43426 1
0020-43599 1 WALL DIVIDE CONTROL BOX MORAT 300MM PVD
0020-43691 4 CLAMP DC CABLE SOURCE 300MM PVD
0020-44374 1
0020-44374 1
0020-44403 3
0020-44403 3
0020-44405 3
0020-44405 3
0020-44406 3 COVER, WIRE CHANNEL, BOTTOM CENTER, RPG, CHBR, 300MM
0020-44559 1
0020-44559 1
0020-44814 1 BUSH LOWER
0020-44839 4
0020-44839 4
0020-44964 1 BLANKOFF, INDEPENDENT LL PUMP & VENT, RI
0020-45649 4
0020-45649 4
0020-46519 1
0020-46519 1
0020-48652 2 COVER, WIRE CHANNEL, LEFT FRONT, RPG CHBR, 300MM
0020-49534 1 COVER, SHIPPING, WATER MANIFOLD, SST CHAMBER, BLUE, 300MM
0020-49655 1
0020-49655 1
0020-52031 3
0020-52031 3
0020-52081 2 BRACKET, MOUNT SENSOR, HEATER LIFT, BLUE 300MM
0020-53251 1 SHAFT MGN COUPLING
0020-54182 2
0020-54182 2
0020-54861 PIN, HOOP HASTELLOY WXZ 300MM
0020-61949 1
0020-61949 1
0020-70050 DOOR SPRING TOP THRU HOLE
0020-70254 C-R LOADLOCK CHAMBER
0020-70254 C-R LOADLOCK CHAMBER
0020-70292 B SHAFT WINDER ROTATION ROBOT DRIVE
0020-70293 B SHAFT WINDER EXTENSION ROBOT DRIVE
0020-70343 1 BRACKET, MOTOR, ROTATION, ORIENTER, WAFE
0020-70343 1
0020-70343 1
0020-70446 A
0020-70446 A
0020-70446 A
0020-70446 A
0020-70666 A NO MATCHES
0020-70668 A
0020-70668 A
0020-70670 A LEFT HAND ACTUATOR
0020-70670 A LFT HAND ACTUATOR TILT BASE
0020-70670 A LEFT HAND ACTUATOR
0020-70670 A LFT HAND ACTUATOR TILT BASE
0020-70671
0020-70671
0020-70671
0020-70671
0020-70677 A NO MATCHES
0020-70687 A SUPPORT ACTUATOR, TILT CASSETTE 8"
0020-70687 A SUPPORT ACTUATOR, TILT CASSETTE 8"
0020-70689 A YOKE, CYLINDER TILT CASSETTE 8"
0020-70700 1 PLATE, SWITCH MOUNTING, TILT CASSETTE`
0020-70700 1 PLATE, SWITCH MOUNTING, TILT CASSETTE`
0020-70732 A COVER, PVD CHAMBER VIEWPORT
0020-70732 A
0020-70732 A
0020-70804
0020-70804
0020-70809
0020-70809
0020-75360 A
0020-75360 A
0020-76001 1 LEVER HINGE WFR CASSETTE HN
0020-76004 C PIVOT PIN CYL WFR CASSETTE HNDLR
0020-76007 A AL BUTTON WFR CASSETTE HNDLR
0020-76010 A PIVOT PIN WFR CASSETTE HNDLR
0020-76011 A CONN PLATE WFR CASSETTE HNDLR
0020-76011 A CONN PLATE WFR CASSETTE HNDLR
0020-76044 A PULLEY MOD STORAGE ELEVATOR
0020-76057 C BASE ROBOT DRIVE
0020-76057 C BASE ROBOT DRIVE
0020-76059 B
0020-76059 B
0020-76061 A
0020-76061 A
0020-76062 B
0020-76062 B SHAFT ROBOT DR
0020-76062 B
0020-76062 B SHAFT ROBOT DR
0020-76066 C ROBOT ARM COUPLER, ROBOT
0020-76073 C ARM LWR LFT ROBOT DRIVE
0020-76075 A
0020-76075 A
0020-76077 B BUSHING SHAFT RETAINER ROBOT DRIVE
0020-76079 B SHAFT SPREADER LWR LFT ARM ROBOT DRIVE
0020-76080 A ADJ NUT LWR LFT ARM ROBOT DRIVE
0020-76085 A SEAL RETAINER EXT SHAFT ROBOT DRIVE
0020-76088 B BRG SPCR ROT FLANGE ROBOT DRIVE
0020-76092 A MOUNT BALL MOUNT STORAGE ELEVATOR
0020-76092
0020-76092
0020-76094 A PIN PIVOT WFR CASSETTE HNDLR
0020-76095 B SPACER SET I ROBOT DRIVE
0020-76099 B
0020-76099 B
0020-76172
0020-76172
0020-76307
0020-76307
0020-76307
0020-76307
0020-76307
0020-76307
0020-76311
0020-76311
0020-76311
0020-76311
0020-76313 A
0020-76313 A
0020-76365 A
0020-76365 A
0020-76434 1
0020-76434 1
0020-76436 P1
0020-76436 P1
0020-76449 B BRACKET MTG SHORT MANIFOLD FAC I/F CENTU
0020-76511
0020-76511
0020-76512 A
0020-76512 A CLAMP ARM ORIENTATOR
0020-76512 A
0020-76512 A CLAMP ARM ORIENTATOR
0020-76524 A EXTENSION PULLEY
0020-76524 A EXTENSION PULLEY
0020-76665 A SPACER, DOMR RIM COMPRESSOR BRKT
0020-76975 A
0020-76975 A
0020-76976 A BLOCK, CLAMP, REAR, MIDDLE, CHBR C&D, CE
0020-76977 1 BLOCK, CLAMP, FRT, LWR & UPPER, CHBR C&D
0020-81367 1
0020-81367 1
0020-CLN-7 NO MATCHES
0021-00085 2 SAFETY HOUSING, GAS SPRING, 200/300MM PR
0021-00152 P2 BRACE, SIMPLE CATHODE HE FEED GASLINE
0021-01107 1 MIRROR, PRODUCER
0021-01440 P6
0021-01440 P6
0021-01550 PIN, CERAMIC, LOADLOCK
0021-01921 2 BALL STUD GAS SPRING LIDLIFTER PRODUCER
0021-02796 P1
0021-02796 P1
0021-02999 2 CONNECTOR BOTTOM
0021-03090 WASHER LID LIFT 300MM PRODUCER
0021-03752 P1 SLIDING TAB BRACKET XFRMR,PYROMETER,RTP
0021-04234 A
0021-04234 A
0021-04509 A
0021-04509 A
0021-06063 1
0021-06063 1
0021-06214 2 VIEWPORT, INDEPENDENT LL PUMP & VENT, PR
0021-06214 2
0021-06214 2
0021-06283 4 FLAG HOME OPTO SENSOR LL PRODUCER
0021-06381
0021-06381
0021-06618 P3
0021-06618 P3
0021-06798
0021-06798
0021-07237 PA
0021-07237 PA
0021-07605 3 SENSOR MOUNT, MOTORIZED LIFT, 300MM, PVD
0021-07744 1 NUT, RF FEEDTHRU, REV 5.0, VECTRA IMP 30
0021-07806 3 SENSOR MOUNT, MOTORIZED LIFT, 300MM, PVD
0021-07865 3
0021-07865 3
0021-07979 PA BRACKET, COLLIMATOR HIGH UNIFORMITY
0021-08178 PA
0021-08178 PA
0021-08179 PA NO MATCHES
0021-08180 PA NO MATCHES
0021-08193 1 SWLL LID SWITCH COVER
0021-08193
0021-08193
0021-08194 2 SWLL CLAMP BLOCK N2 FEED THRU
0021-08292 2 BRACKET ADJ WAFER SLIDE SENSOR LOADLOCK
0021-08319 1 RETAINER, 8" HIGH UNIFORMITY KEYED SOCKE
0021-08320 1 BRACKET ELEC FEED THRU HIGH UNIFORMITY O/D
0021-08385 1 SWLL LID SWITCH COVER-ENP
0021-08386 2
0021-08386 2
0021-08389 3&4 BRACKET,LID,WAFER, SENSOR PRODUCER
0021-08495 3 NO MATCHES
0021-085207 2
0021-085207 2
0021-08521
0021-08521
0021-10743 A NO MATCHES
0021-11110 3 EDGE RING
0021-11110 3 EDGE RING
0021-12070 2
0021-12070 2
0021-12185 1
0021-12185 1
0021-12610 5
0021-12610 5
0021-12610 5
0021-12610 5
0021-12759 2 BRACKET SUPPORT GAS LINES SST HTR 300MM
0021-13265 4 ION GUAGE BRACKET, 300MM PVD
0021-13298 3 BASE CLAMP COOLER 200/300MM LL PRODUCER
0021-15317 2
0021-15317 2
0021-16035 2 CRYO-SHIELD, 300MM PVD CHAMBER
0021-16036 2 DE STUD, 1.75 OAL
0021-19083 1 NO MATCHES
0021-19084 2 INSERT, SLOTED, PIN ALIGNMENT, ADAPTER,
0021-19085 2 INSERT, ROUND, PIN ALIGNMENT, ADAPTER, 2
0021-19152 3 PARTICLE RING, 300MM PVD CHAMBER
0021-19152 3 PARTICLE RING, 300MM PVD CHAMBER
0021-19152 3
0021-19152 3
0021-19152 3
0021-19152 3
0021-19152 3
0021-19152 3
0021-20077 NO MATCHES
0021-20077 NO MATCHES
0021-20077 NO MATCHES
0021-20369 A CLAMP B101 HEATER 1.18" DIA SHAFT
0021-20369 A CLAMP B101 HEATER 1.18" DIA SHAFT
0021-20535 PA ADAPTER, CASSETTE NEST SMIF
0021-20535 PA
0021-20535 PA
0021-20830 3 ADAPTER, BLOCK WATER 300MM, IMP, REV 4.5
0021-20848 1
0021-20848 1
0021-20849 1 CLAMP,INSERT INSULATOR 300MM IMP, REV 4
0021-20851 2 NUT, RF FEEDTHRU 300MM IMP, REV 4.5
0021-20871 2 BRACKET,300MM PVD CHAMBER LEFT GASBOX
0021-20872 2 BRACKET,300MM PVD CHAMBER RIGHT GASBOX
0021-21258 1 CAP, HTR PWR F/T
0021-21258 1
0021-21258 1
0021-21262 3 FINGER, INSULATED
0021-21266 B BLANKOFF FLANGE 1.33" OD, W/FLAT
0021-21311 1 CUP OUTER RIGID COIL SPRT ELECTRA IMP-CU
0021-21504 A
0021-21504 A
0021-21505 PA
0021-21505 PA
0021-21506 A
0021-21506 A
0021-21681
0021-21681
0021-21704 B SCREEN RF SHIELD, 6" VIEWPORT IMP, PVD
0021-21704 1 SCREEN RF SHIELD, 6" VIEWPORT IMP, PVD
0021-21770 1 SHIM, .75MM(.029")SST 300 MM PVD
0021-21771 1 SHIM, .50MM(.019")SST 300 MM PVD
0021-21772 1 SHIM, .25MM(.009")SST 300 MM PVD
0021-21776 2 PANEL, 300MM CHM WATER MANIFOLD
0021-21815 1
0021-21815 1
0021-21828 3 BRACKET, 300MM CRYO DRIP PAN
0021-21828 3 BRACKET, 300MM CRYO DRIP PAN
0021-21981 PA
0021-21981 PA
0021-22372 1
0021-22372 1
0021-22492 A CLAMP BLADE, HP+ROBOT BLADE, ENDURA TRANSFER
0021-23057 2 GROUND BUS LUG, DC HP CONNECTOR, 300MM P
0021-23914 1 SHIM, .25MM(.009")SST HI PWR, 300MM
0021-23915 1 SHIM, 1MM(.039")SST HI PWR, 300MM
0021-23916 1 SHIM, .75MM(.029")SST HI PWR, 300MM
0021-23917 1 SHIM, .50MM(.019")SST HI PWR, 300MM
0021-25000 2 SHIM, 1MM(.009") SST HI PWR 300MM
0021-25001 2 SHIM, 1MM(.039") SST HI PWR 300MM
0021-25003 2 SHIM, 1MM(.019") SST HI PWR 300MM
0021-26056
0021-26056
0021-26244 1 SENSOR MOUNT, MOTORIZED HEATER LIFT
0021-35028 1 BRACKET, INTERLOCK SWITCH
0021-35091 A NO MATCHES
0021-35808 P1 PLATE,MTG RGLTR
0021-35923 1 SHAFT GRND, .38 X 5.25 HINGE, TXZ
0021-36239 A
0021-36239
0021-36239 A
0021-36239
0021-37888
0021-37888 A
0021-37888
0021-37888 A
0021-38051
0021-38051
0021-38106 B BRKT, TEOS LINE, 300MM, DCVD
0021-38681 P2 BRACKET LOWER RF MATCH PRODUCER
0021-38829
0021-38829
0021-70012 A MAGNET HOLDER EXTENSION, INNER P5000 MC
0021-70013 A
0021-70013 A
0021-70014 A BEARING TUBE INNER ROTATION DRIVE P5000
0021-70015 A ROTATION PLATE PRIMARY LINK P5000 MC ROB
0021-70092 P1
0021-70092 P1
0021-70168 A
0021-70168 A
0021-70168 A
0021-70168 A
0021-70277 A
0021-70277 A
0021-70280 A
0021-70280 A
0021-70400 P2
0021-70400 P2
0021-70407 1 HOME SENSOR BRACKET
0021-70418 1 BRACKET, LIFT DOOR ASSY W/AIR CUSHIONED
0021-70419 SUB-SWILL, HOOP PIN
0021-70451 PA
0021-70451 PA
0021-76029 1
0021-76029 1 BASE 15 SLOT STORAGE ELEV
0021-76029 1 BASE 15 SLOT STORAGE ELEV
0021-76029 1
0021-76029 1 BASE 15 SLOT STORAGE ELEV
0021-76029 1 BASE 15 SLOT STORAGE ELEV
0021-76040 EYEHOOK, CHAMBER, 300MM PVD
0021-76243 1 CAP, SCREENED BAFFLE 300MM ENP
0021-76245 1 BASE SCREENED BAFFLE 300MM ENP
0021-76764 P2 COVER REV 3 CR SLIT VALVE BELLOWS UPPER
0021-76881 COVER SIDE PLATE 300MM FI LLC
0030-20012 D COVER PLATE LASER
0030-20025 A ENCLOSURE 90 DEG. COVER LIFT 46.46
0030-20025 A ENCLOSURE 90 DEG. COVER LIFT 46.46
0030-76140
0030-76140
0035-20023 1 COVER, PULLEY, MAGNET FEEDTHRU, 300MM PV
0040-00012
0040-00012
0040-02661 P1 BRACKET,FILTER BOX LATCH ASSY,HT DPS
0040-02798 A
0040-02798 A
0040-02932 A BASE HEATER 8" ENH
0040-02932 A BASE HEATER 8" ENH
0040-03504 9
0040-03504 9
0040-03504 9
0040-03504 9
0040-03504
0040-03504 1 SWLL COOLDOWN PEDESTAL
0040-03504 9
0040-03504 9
0040-03504 9
0040-03504 9
0040-03504
0040-03504 1 SWLL COOLDOWN PEDESTAL
0040-03504.PO1 1
0040-03504.PO1 1
0040-03509 5
0040-03509 5
0040-03733 1
0040-03733 1
0040-03733 A
0040-03733 1
0040-03733 1
0040-03733 A COVER ORIENTR DEGAS
0040-03733 A CHAMBER ORIENTR DEGAS NOB
0040-03733 1
0040-03733 1
0040-03733 A
0040-03733 1
0040-03733 1
0040-03733 A COVER ORIENTR DEGAS
0040-03733 A CHAMBER ORIENTR DEGAS NOB
0040-03734 A
0040-03734 A CHAMBER ORIENTR DEGAS NOB
0040-03734 A CHAMBER NOB
0040-03734 A
0040-03734 A CHAMBER ORIENTR DEGAS NOB
0040-03734 A CHAMBER NOB
0040-03792 2 BEZEL, SIDE MOUNT, SWLL DOOR
0040-03795
0040-03795
0040-03799
0040-03799
0040-03834 2
0040-03834 2
0040-04037 3 BLOCK, SHAFT CLAMP, WAFER LIFT
0040-04038 4
0040-04038 4
0040-04099 3 BRACKET, ELECTRICAL I/F
0040-04100 4 MOUNT, STEPPER MOTOR
0040-04100 4 MOUNT, STEPPER MOTOR
0040-04350 P1 NO MATCHES
0040-04544 LIFT PLATE, LIFT ASSY 300MM HDPCVD
0040-04544 2
0040-04544 2
0040-04550 1 BRKT, 300MM SOURCE INTERFACE
0040-05069 1 SWLL, BRACKET, CFW
0040-05069 P1
0040-05069 P1
0040-05087 2
0040-05087 2 BLOCK MIXING HEATED TANOX
0040-05087 2
0040-05087 2 BLOCK MIXING HEATED TANOX
0040-05093 2
0040-05093 2
0040-05242 BULKHEAD, 300MM J-BOX, IGUS
0040-05243 5
0040-05243 5
0040-05244
0040-05244
0040-05475 2 COVER BOTTOM LEFT HINGED ORIENTER @ F
0040-05476 2 COVER BOTTOM RIGHT HINGED ORIENTER @ F
0040-05855 2 NO MATCHES
0040-06000 1 VIEW PORT ASSEMBLY, ULTIMA, HDP-CVD
0040-06675 2
0040-06675 2
0040-07198 4 MOUNT MOTOR, WAFER LIFT, 300MM PVD
0040-07332 2
0040-07332 3
0040-07332 3
0040-07332 2
0040-07332 3
0040-07332 3
0040-07443
0040-07443 2
0040-07443
0040-07443 2
0040-07501 5 COVER, LAMP WIRE, RH, 300MM PVD
0040-07502 3
0040-07502 3
0040-07503 4
0040-07503 4
0040-07503 4
0040-07503 4
0040-08147 2
0040-08147 2
0040-08147 2
0040-08147 2
0040-08944 2
0040-08944 2
0040-09050 6
0040-09050 6
0040-09117 COOLER, WAFER, 300MM, 200/300MM PRODUCER
0040-09118
0040-09118
0040-09221 C
0040-09221 C
0040-09221 C
0040-09221 C
0040-09312 A CYLINDER CLAMPING 200MM HEWEB
0040-09649 4 BELLOWS, INCONEL WELDMENT, LIFT ASSY, 30
0040-09723 C
0040-09723 C
0040-13377 A WING,LT,ENHANCED HP
0040-13379
0040-13379 A
0040-13379
0040-13379
0040-13379 A ARM LFT HP+ ROBOT
0040-13379 LEFT ARM HP ROBOT
0040-13379
0040-13379 A
0040-13379
0040-13379
0040-13379 A ARM LFT HP+ ROBOT
0040-13379 LEFT ARM HP ROBOT
0040-13380 A
0040-13380 A ARM RT HP + ROB
0040-13380 A RIGHT ARM HP ROBOT
0040-13380 A
0040-13380 A ARM RT HP + ROB
0040-13380 A RIGHT ARM HP ROBOT
0040-13445 P2
0040-13445 P2
0040-13447.2
0040-13447.2
0040-13448 1
0040-13448 1
0040-13653 B
0040-13653 B
0040-13910 P3
0040-13910 P3
0040-13910 P3
0040-13910 P3
0040-13911 P3
0040-13911 P3
0040-13963 A
0040-13963 A
0040-19896 2 NO MATCHES
0040-20056 1 ADAPTOR ELBOW .25VCR TO MINI CF, GAS LIN
0040-20154 B
0040-20154 B
0040-20154 B
0040-20154 B
0040-20291 A
0040-20291 A
0040-20548 B
0040-20548 B
0040-20548 B MANIFOLD BUFFER CHAMBER
0040-20548 B
0040-20548 B
0040-20548 B MANIFOLD BUFFER CHAMBER
0040-20726 A
0040-20726 A
0040-20726 A
0040-20726 A SHIELD MTH  HEATER RF TOP
0040-20726 A SHIELD MTH  HEATER RF TOP
0040-20726 A SHIELD MTH  HEATER RF TOP
0040-20726 A
0040-20726 A
0040-20726 A
0040-20726 A SHIELD MTH  HEATER RF TOP
0040-20726 A SHIELD MTH  HEATER RF TOP
0040-20726 A SHIELD MTH  HEATER RF TOP
0040-20727 A
0040-20727 A
0040-20727 A
0040-20727 A
0040-20839
0040-20839
0040-21164 A COOLING PLATE ACTUATOR SHUTTER LINKAGE
0040-21495 1
0040-21495 1
0040-21684 E CASE WINDOW
0040-21684 E CASE WINDOW
0040-22202 A SPACER PILLOW BLOCK
0040-22202 A SPACER PILLOW BLOCK
0040-22592 B
0040-22592 B
0040-22595 B
0040-22595 B
0040-22915 8
0040-22915 8
0040-22921
0040-22921
0040-23141 3 ADAPTOR TTN 300MM
0040-23141 3 ADAPTOR TTN 300MM
0040-23169 1 AIRLINE, 300MM CHAMBER WATER BLOWOUT
0040-23319 4
0040-23319 4
0040-23349 1 BRACKET, 300MM SOURCE INTERFACE
0040-23655
0040-23655
0040-23661
0040-23661
0040-23662 350
0040-23662 350
0040-23778 2 ADAPTOR TOP
0040-23778 2 ADAPTOR TOP
0040-23915 3 SLEEVED CAP
0040-24074 BRKT, SOURCE MOTOR, 300MM PVD
0040-24190 B
0040-24190 B
0040-24190 B
0040-24190
0040-24190 B
0040-24190 B
0040-24190 B
0040-24190
0040-24280 3 HANDLE, SOURCE, 300MM, PVD
0040-32449 2 LID PUMPING PLATE
0040-32449 2 LID PUMPING PLATE
0040-32764 3 BRKT.SUPPORT N2 PURGE MULTI SLOT
0040-32834 1 BRACKET, GAS LINE 1, 300MM HDP-CVD
0040-32868
0040-32868 1
0040-32868
0040-32868 1
0040-32871
0040-32871
0040-33264 3
0040-33264 3
0040-33523 6 BRCKT, GAS LINE, 3/8", #2, ASPX, CHMBR C
0040-33524 4&5 BRCKT, GAS LINE, 3/8", #1, ASPX, CHMBR D
0040-33914 4
0040-33914 4
0040-34012 2 DOOR, ASSEMBLY, BACKING
0040-34013 2
0040-34013 2
0040-34014 2 DOOR, ASSEMBLY, SEALING
0040-34257 4 REPLACED BY 0040-60659 REV 001 PER DRCN 04-003
0040-35060 B
0040-35060 B
0040-35060 B
0040-35060 B
0040-36783 1
0040-36783 1
0040-37175 1 PLATE, MTG DRIVER, 300MM
0040-37523 1
0040-37523 1
0040-38375 1 PLATE SAFETY HANDLE RIGHT 300MM PRODUCER
0040-38517 1
0040-38517 1
0040-38638 2 FRONT COVER SH. METAL
0040-38638 2 FRONT COVER SH. METAL
0040-38936 2 PLATE SAFETY HANDLE LEFT 300MM PRODUCER
0040-39183 1 HOUSING, TERMINAL BLOCK MICROWAVE OVEN
0040-39204 1 WELDMENT,FEEDTHROUGH,1/2" HEATED
0040-39487 P3
0040-39487 P3
0040-39487 P3 DYNMAC
0040-39487 P3
0040-39487 P3
0040-39487 P3 DYNMAC
0040-39488
0040-39488
0040-39502 P1
0040-39502 P1
0040-39554 B GIMBAL ASSY,ORIENTER LIFTER ASSY
0040-39554 B
0040-39554 B
0040-39554 B
0040-39554 B
0040-39554 B
0040-39554 B
0040-39554 B
0040-39554 B
0040-39721 1 BRACKET, MIRROR, TRANSFER CHAMBER
0040-39722 P1 CLAMP, 1" LEADSCREW LL 300MM PRODUCER
0040-39723 P5 PLATE COLUMG TOP LIFT PRODUCER
0040-39977 1 BODY 200MM CHAMBER PROD
0040-39977 1 CHAMBER
0040-39977 1 BODY 200MM CHAMBER PROD
0040-39977 1 CHAMBER
0040-40111 B ASSY. 2 SLOT TREY 20
0040-40111 B ASSY. 2 SLOT TREY 20
0040-40145 B
0040-40145 B
0040-40231 1 NO MATCHES
0040-41047 1
0040-41047 1
0040-41096 3
0040-41096 3
0040-41097 2
0040-41097 2
0040-41325 1 RETAINER, SPRING, SIDE RF SOURCE, 300MM
0040-41326 RETAINER, SPRING, TOP RF SOURCE, 300MM U
0040-41940 CHAMBERS
0040-41940 CHAMBERS
0040-42717 1
0040-42717 1
0040-42717 1
0040-42717 1
0040-43392 1
0040-43392 1
0040-43392 1
0040-43392 1
0040-43392 1
0040-43392 1
0040-43597 2
0040-43597 2
0040-43939 1
0040-43939 1
0040-44472 1
0040-44472 1
0040-44499
0040-44499
0040-44500
0040-44500
0040-44500
0040-44500
0040-44559 1
0040-44559 1
0040-45439
0040-45439
0040-45439
0040-45439
0040-45770 1 HOLDER, LASER DIODE
0040-46381 4
0040-46381 4
0040-48082 2
0040-48082 2
0040-48673 3
0040-48673 3
0040-48677
0040-48677
0040-48677
0040-48677
0040-48763 3
0040-48763 3
0040-48973 1 COVER, SAFETY, WAFER LIFT PCB, 300MM
0040-48973 1
0040-48973 1
0040-49609 1
0040-49609 1
0040-49610 1 MANIFOLD OUT LEFT
0040-49610 1 MANIFOLD OUT LEFT
0040-49613 1 SHIELD LOWER HEATER 300MM ENDURA
0040-49665 3 REPLACED BY 0040-81505, ECO 211501
0040-49666 REPLACED BY 0040-81497, ECO 211501
0040-49905 3
0040-49905 3
0040-51148 SGD, UPPER SHOWER HEAD, 300MM EMAX
0040-51148 4
0040-51148 3
0040-51148 4
0040-51148 4
0040-51148 4
0040-51148 4
0040-51148 3
0040-51148 4
0040-51148 4
0040-51148 4
0040-51512 2
0040-51512 2
0040-52072 2
0040-52072 2 HINGE BRACKET UNIVERSAL LID
0040-52072 2
0040-52072 2 HINGE BRACKET UNIVERSAL LID
0040-52254 2
0040-52254 2
0040-52816 2
0040-52816 2
0040-53124 2 CHAMBER  
0040-53124 2 CHAMBER  
0040-54279 4
0040-54279 4
0040-55475
0040-55475 1
0040-55475
0040-55475 1
0040-55493 2 MOUNTING BRACKET, 300MM L-DOOR
0040-60456
0040-60456
0040-60660
0040-60660 1
0040-60660
0040-60660 1
0040-60661 1
0040-60661 1
0040-60662 1
0040-60662 1
0040-60842 2 BRACKET SUPPORT L/R LID LIFT PRODUCER
0040-60843 2
0040-60843 2 LEVER LID LIFT RT PRODUCER
0040-60843
0040-60843 2
0040-60843 2 LEVER LID LIFT RT PRODUCER
0040-60843
0040-60844 2 LEVER LID LIFT LEFT PRODUCER
0040-60844 2 LEVER LID LIFT LEFT PRODUCER
0040-61331 2 CLAMP 1" LEADSCREW LL PRODUCER
0040-61817 4 LID
0040-61817 4 LID
0040-62257
0040-62257
0040-62258 2 CHAMBER BODY
0040-62258 2 CHAMBER BODY
0040-62288 1
0040-62288 1
0040-62541
0040-62541
0040-62595 1
0040-62595 R1
0040-62595 1
0040-62595 R1
0040-62880 CHAMBERS
0040-62880 CHAMBERS
0040-63078
0040-63078 1
0040-63078
0040-63078 1
0040-63090 1
0040-63090 1
0040-63090 1
0040-63090 1
0040-63091 1
0040-63091 1
0040-63091 1
0040-63091 1
0040-63091 1
0040-63091 1
0040-63248 1
0040-63248 1
0040-63248 1
0040-63248 1
0040-63416 4
0040-63416 4
0040-63738 5
0040-63738 5
0040-64020
0040-64020
0040-64764 2
0040-64764 2
0040-68090 1
0040-68090 1
0040-70178 A
0040-70178 A
0040-70178 A
0040-70178 A
0040-70178 A
0040-70178 A
0040-70217 A
0040-70217 A
0040-70270 SWLL LEFT SIDE WAFER SUPPORT FIN
0040-70271 SWLL RIGHT SIDE WAFER SUPPORT FIN
0040-70289 1 SWLL DRIVE MOUNTING V-BLOCK
0040-7047 4
0040-7047 4
0040-70477 4
0040-70477 4
0040-70477 4
0040-70477 4
0040-70477 4
0040-70477 4
0040-70592 3 CAP, BAKEOUT LAMP FEED THRU, RPK HYBRID, 300MM
0040-70682 2 SHIELD FRONT HEATER 300MM ENDURA
0040-70683 1
0040-70683 1
0040-75025 P1
0040-75025 P1
0040-75025 P1
0040-75025 P1
0040-75138 A
0040-75138 A
0040-75296 4
0040-75296 4
0040-75354 P1 LIFT PIN, ROBOT LIFT FIXTURE,300MM
0040-75717 1 TOP, WRIST 300MM ROBOT, CORROSION RESIST
0040-75718 1 BASE, WRIST 300MM ROBOT, CORROSION RESIS
0040-75800 2
0040-75800 2
0040-758009 1 0040-75800; Bezel 300mm SWLL Door Mount - 0040-75809 No Matches
0040-75809 1
0040-75809 1
0040-75904 B
0040-75904 B
0040-75904 B
0040-75904 B
0040-75906 P3 RIGHT, VHP+ ROBOT
0040-75906 P3 RIGHT, VHP+ ROBOT
0040-75906 P3 RIGHT, VHP+ ROBOT
0040-75906 P3 RIGHT, VHP+ ROBOT
0040-75909 2
0040-75909 2
0040-75909 2
0040-75909 2
0040-75920
0040-75920
0040-75920
0040-75920
0040-75933
0040-75933
0040-75934
0040-75934
0040-76046 C
0040-76046 C RT TURBO CONTROL
0040-76046 C
0040-76046 C RT TURBO CONTROL
0040-76047
0040-76047
0040-76047
0040-76047
0040-76047
0040-76047
0040-76522 2
0040-76522 2
0040-76822 2 LEFT FIN, NON-SLIP, LS, 300MM MD SWLL
0040-76823 2 LEFT FIN, NON-SLIP, RS, 300MM MD SWLL
0040-76823 2
0040-76823 2
0040-80777 1 NO MATCHES
0040-80886
0040-80886 1
0040-80886
0040-80886 1
0040-82031 TRAYS, WAFER 300MM PRODUCER, SST PINS
0040-82031
0040-82031
0040-82031
0040-82031
0040-82132 1
0040-82132 1
0040-84003 1
0040-84003 1
0040-84003 1
0040-84003 1
0040-84651 1 SEAL PLATE 300MM L,DOOR COR
0040-84651 1 SEAL PLATE 300MM L,DOOR COR
0040-84652 1
0040-84652 1
0040-84679 2
0040-84679 2
0040-85052 E
0040-85052 E
0040-85059 1
0040-85059 1
0040-85062 1 LIFT FIN, 300MM MD SWLL, LEFT SIDE, LIFT
0040-85062 1
0040-85062 1
0040-85063 1 LIFT FIN, 300MM MD SWLL, RIGHT SIDE, RES
0040-85063 1
0040-85063 1
0040-86694 1 CHAMBER BODY, SST WATERCOOLED, 300MM E2
0040-86694
0040-86694
0040-86942 1
0040-86942
0040-86942
0040-86942 1 BRACKET LEFT SIDE WAFFER LIFT
0040-86942 1
0040-86942
0040-86942
0040-86942 1 BRACKET LEFT SIDE WAFFER LIFT
0040-89404 P1 NO MATCHES
0045-00058 E1 BRACKET, RIGHT, SUPPORT, LOADLOCK, 200/3
0045-00071 1&2 FLANGE, CLAMP BELLOWS HEATER 300MM PVD
0045-00074 3 CLAMP, CHMBR GAS LINES GAS BOX SIDES
0045-00075 3 CLAMP CHNBR GAS LINES MAINFRAME SIDE
0045-20003 A
0045-20003 A
0050-06288 1 WELDMENT, DXZ CHAMBER LINE
0050-44161 4 ADAPTER, BARATRON GAUGE
0050-44837 2
0050-44837 2
0050-47711 TUBING, MANIFOLD EV31, 300MM CHAMBER
0050-47712 2 TUBING, MANIFOLD EV30, 300MM CHAMBER
0050-47713 3 TUBING, MANIFOLD CDA SUPPLY, 300MM CHAMB
0050-47714 3 TUBING, MANIFOLD CDA EXHAUST, 300MM CHAM
0050-47715 TUBING, CRYOPUMP, N2 SUPPLY, 300MM CHAMB
0050-47716 2 TUBING, CRYOPUMP, N2 RETURN, 300MM CHAMB
0050-75273 P1 KINETICS
0050-75273
0050-75273
0050-75273 P1 KINETICS
0050-75273
0050-75273
0050-75274 2
0050-75274 2
0050-75275 P1 RETURN ADAPTER, 300MM WATER MANIFOLD
0050-75286 2
0050-75286 2
0050-75287
0050-75287
0060-01114 3
0060-01114 3
0060-01166 1
0060-01166 1
0060-02044 1
0060-02044 1
0060-13113 A USE PART # 0060-02041
0060-21035 LABEL GROUND 417-IEC-5017
0060-21441 A USE PART # 0060-01976
0060-21442 B
0060-21442 B
0060-21443 A LABEL, WARNING UV / IR HAZARD
0060-76118 1 LABEL,MANUAL VALVE,1" DIAMETER CIRCLE
0060-76128 1 USE PART # 0060-02015
0060-76133 B USE PART # 0060-01988
0060-76187 4 USE PART # 0060-02044
0060-76232 LABEL WARNING ANSI WEIGHT 50-100
0060-76233 LABEL WARNING ANSI WEIGHT 100-250 LBS
0060-76260 A USE PART # 0060-01983
0060-76260 P1 USE PART # 0060-01983
0090-00412
0090-00412
0090-00412
0090-00412
0090-00417 4
0090-00417 4
0090-00422 3
0090-00422 3
0090-01141
0090-01141
0090-01312 2
0090-01312 2
0090-01464 2
0090-01464 2
0090-01639 REED SWITCH, 300MM L-DOOR
0090-01639 3
0090-01639 3
0090-02473
0090-02473
0090-02856 3
0090-02856 3
0090-03264 1
0090-03264 1
0090-03264 1
0090-03264 1
0090-20015 C DEGAS LAMP OVERTEMP SWITCH ASSY
0090-20015 C
0090-20015 C
0090-20016 B
0090-20016 B
0090-20036 D
0090-20036 D
0090-20036 D
0090-20036 D
0090-20036 D
0090-20036 D
0090-20125 PD 2.57
0090-20125 PD 2.57
0090-20126 2.4
0090-20126 PD
0090-20126 2.4
0090-20126 PD
0090-20127 19.53
0090-20127 PA
0090-20127 19.53
0090-20127 PA
0090-20128 PA ELECTRICAL ASSY BUFFER UP
0090-20128 19.97
0090-20128 PA
0090-20128 19.97
0090-20128 PA
0100-00244 1 PCB ASSEMBLY PRODUCER WAFER SLIDE DETECT
0100-00567 MFC DISTRIBUTION
0100-01098 1 PCBA LASER DRIVER II
0100-01130
0100-01130
0100-76259 5
0100-76259 5
0100-76259 5
0100-76259 5
0100-76259 5
0100-76259 5
0100-76259 5
0100-76259 5
0140-00118 2 HARN ASSY, PNEUMATIC INPUTS, 300MM ENDUR
0140-00486 HARNESS ASSEMBLY AMP TO PCB INVERTER LL
0140-01620 P1
0140-01620 P1
0140-01670
0140-01670
0140-01671
0140-01671
0140-01699 2 HARN. ASSY., 300MM GAS BOX DIST. BD
0140-03646 4 HARNESS ASSY REAR LAMP 300MM PVD CHAMBER
0140-03705 2
0140-03705 1
0140-03705 2
0140-03705 1
0140-03756 HARN ASSY J-BOX RF PWR SUPPLY 300MM ENDU
0140-04377 3
0140-04377 3
0140-07873 1
0140-07873 1
0140-09214 D
0140-09214 D
0140-11167 1 HARN ASSY, GASBOX DIST BD, 300MM CPI
0140-20116 B
0140-20116 B
0140-20118 C HARNESS ASSY, CCD BD/LASER DRIVER INT.
0140-20118 C
0140-20118 C
0140-20121 E
0140-20121 E
0140-20121 E
0140-20121 E
0140-20215 B HARNESS ASSY LASER DIODE POWER
0140-20563 A
0140-20563 A
0140-20572 A HARNESS OVER TEMP SW DEGAS
0140-21589 1 HARN. ASSY.,RIGHT LAMP,300MM CHM
0140-21590 2 HARN. ASSY.,LEFT LAMP,300MM CHM
0140-38535 2 HARNESS ASSY, DRIVER, AC ADAPTER, PRODUCER
0140-70192 A
0140-70192 A
0140-70238 HARNESS ASSEMBLY, THERMAL SWITCH
0140-76184
0140-76184
0140-76184
0140-76184 B
0140-76184
0140-76184
0140-76184
0140-76184 B
0140-76185
0140-76185 B
0140-76185
0140-76185 B
0140-76186
0140-76186 B
0140-76186 B
0140-76186
0140-76186 B
0140-76186 B
0140-76187
0140-76187
0140-76187 B
0140-76187
0140-76187
0140-76187 B
0140-76188
0140-76188 B
0140-76188
0140-76188 B
0140-76189 B HARNESS ASSY. LAMP SOCKET C2/C3
0140-76189
0140-76189 B
0140-76189
0140-76189 B
0140-76190 B
0140-76190 B KTEC
0140-76190 B KTEC
0140-76190 B
0140-76190 B KTEC
0140-76190 B KTEC
0150-00319 7 CABLE ASSY, STEPPER MTR ENCODER, 300MM E
0150-00321 5 CABLE ASSY, STEPPER MTR POWER, 300MM END
0150-00322 2 CABLE ASSY, CHM EMO INTRC., 300MM ENDURA
0150-01768 1 CABLE ASSY, STEPPER DRIVER STATUS INTERC
0150-01944 3 CABLE, HLIFT HOME SENSOR, 300MM ENDURA CONTROL
0150-02046 4 CABLE ASSY STEPPER HOME SENSOR
0150-02099 CABLE ASSY, CRYO AC POWER, 300MM ENDURA
0150-02100 4
0150-02100 4
0150-02100 4
0150-02100 4
0150-02202 1 CABLE ASSY, GAS PNL INTLK JMPR, 300MM EN
0150-02456 3 CABLE ASSY, 300MM CHAMBER WATER SENSOR
0150-02627
0150-03538 2
0150-03538 2
0150-06292 3
0150-07698
0150-07699
0150-08164 1
0150-09840 B KTEC
0150-09840 B KTEC
0150-10120
0150-10120
0150-10120
0150-10120
0150-20103 A CABLE ASSY, CCD BD INT.
0150-20103 A CABLE ASSY, CCD BD INT.
0150-20103 A
0150-20103 A
0150-20103 A
0150-20103 A
0150-20262 F CABLE ASSY DEGAS AC
0150-20263 B
0150-20263 B
0150-20263 B
0150-20263 B
0150-21789 2
0150-35462 P2
0150-35462 P2
0150-70120 B
0150-70120 B
0150-76028 1
0150-76028
0150-76028 1
0150-76028
0190-00525
0190-00525
0190-01174 P1
0190-03212
0190-03212
0190-07613 LEYBOLD VACUUM
0190-07613 LEYBOLD VACUUM
0190-09895
0190-09895
0190-09900
0190-09900
0190-09901
0190-11432
0190-11452
0190-12709 1 COUPLER, FLEX, LEADSCREW/MOTOR LL PRODUCER (REPLACES 0190-36649)
0190-13091
0190-13091
0190-13312
0190-13312
0190-13312
0190-13312
0190-14093 GROUND STRAP, CH STAND/CH AC JBOX, 300MM
0190-14364
0190-14364
0190-20168
0190-20168 PB CABLE  10.86
0190-20168
0190-20168 PB CABLE  10.86
0190-40098
0200-01577 1 PLATE, LL ORIFICE QUARTZ
0200-01668 2 FILTER, 670NM, 1.2DIA., .1 THICK
0200-09005 C WINDOW, QUARTZ
0200-09005 C
0200-09005 C
0200-09005 C
0200-09005 C
0200-09005 C
0200-09005 C
0200-09951
0200-20161 2
0200-20161 2
0200-20161 2
0200-20162 2
0200-20163 2
0200-20164 2
0200-76041 2
0200-76044 1
0200-76044 1
0200-76044 1
0200-76044 1